How To Write Small and Do Other Things Small Part 3: Etching
So we’ve talked about lithography, and we’ve talked about EUV, as well as how we avoid using EUV, but why exactly do we do lithography? [Read more...]
So we’ve talked about lithography, and we’ve talked about EUV, as well as how we avoid using EUV, but why exactly do we do lithography? [Read more...]
So, we previously talk a bit about immersion, and low K tricks to get 193 nm wavelength light down to 82 nm pitch features. This is the state of the art 193 immersion (193i) photolithography using an ArF laser. But hold on a second we know that Intel's 10 nm node has a 34 nm fin pitch and a 36 nm metal pitch. How is that possible? [Read more...]
What's the motivation to create smaller features? Is it raw speed? Performance? [Read more...]
What's the motivation to create smaller features? Is it raw speed? Performance? [Read more...]