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Articles From Moshe Dolejsi

How To Write Small and Do Other Things Small Part 3: Etching

by: Moshe Dolejsi
March 03, 2019

So we’ve talked about lithography, and we’ve talked about EUV, as well as how we avoid using EUV, but why exactly do we do lithography? [Read more...]

How To Write Small and Do Other Things Small Part 2: Avoiding the EUV Catastrophe

by: Moshe Dolejsi
October 19, 2018

So, we previously talk a bit about immersion, and low K tricks to get 193 nm wavelength light down to 82 nm pitch features. This is the state of the art 193 immersion (193i) photolithography using an ArF laser. But hold on a second we know that Intel's 10 nm node has a 34 nm fin pitch and a 36 nm metal pitch. How is that possible? [Read more...]

What's the big deal with EUV (Extreme UltraViolet)?

by: Moshe Dolejsi
September 19, 2018

What's the motivation to create smaller features? Is it raw speed? Performance? [Read more...]

How To Write Small and Do Other Things Small - Part 1 - Lithography

by: Moshe Dolejsi
August 19, 2018

What's the motivation to create smaller features? Is it raw speed? Performance? [Read more...]

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